JEL SVCR3260
3-Axis Cylindrical Coordinate Clean Robot
Peculiarity
Product Profile
Model Name ： SVCR3260
Environment ： Vacuum (Temp. 15°C to 50°C)/Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Arm ： Single arm
Operating Range ： 520mm (3rd joint center)
Vertical Stroke ： 20mm / 40mm
Payload Capacity ： 2kg (calculated for the arm 3rd joint)
List of Product Model
Product Model Vertical Stroke
SVCR3260-020-PM 20mm
SVCR3260-040-PM 40mm
Characteristics
Designed for handling wafers in the vacuum chamber of production line and inspection line
Double payload and superior cost performance compared to SVHR series
Compatible with SVHR series and it is possible to replace or upgrade into SVCR series
Magnetic fluid sealing is used for arm joint
Vacuum sealing: Magnetic fluid sealing and bellows are used
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm
Motion monitoring is available
RS232C and parallel photo I/O are standard for control
2-phase stepping motor installed in all axes
Servo motor type is available
High-speed, high-accuracy wafer handlingby S-curved speed control
Wafer holding: end-effector with passive edge or edge grip type End-effector
End-effector material: CFRP, Al, ceramic, or others
Optimal end-effector is selectable according to the carrying object and line layout